Special wafer-supercritical drying instrument

brief introduction:

 Traditional drying method, liquid gasification under the condition of high temperature, will produce a certain amount of surface tension, will be likely to destroy the fine structure of the sample, for special samples, such as biological samples, MEMS, using the traditional drying method will lead to the sample microstructure is damaged, and using supercritical drying method, the medium using liquid carbon dioxide-supercritical carbon dioxide-gas carbon dioxide phase transition method, the interface surface stress will be zero, can save the fine structure of the sample.

Supercritical dryer specially designed for MEMS (Micro-Electro-Mechanical System) for clean chamber.

Manual supercritical drying automatic supercritical drying instrument vertical supercritical drying instrument

Specifications:

Product features:

Dry sample: wafer drying special, suitable for a variety of size samples, a maximum of 5 samples each time;

Observation window: high pressure sample chamber with sapphire window and illumination to observe the internal situation of the sample pool;

Sample pool material: 316L stainless steel integrated processing, ep treatment, suitable for liquid carbon dioxide, high purity ethanol, IPA and acetone;

Refrigeration mode: built-in compressor refrigeration, to avoid the gas waste caused by carbon dioxide refrigeration, refrigeration temperature can quickly reach 0℃;

Sample cell filling: PTFE sample chamber filling ring can adjust the sample chamber diameter to fit 2 ", 4", 6 " wafer, save LCO2 dosage, shorten the drying time, improve the drying efficiency;

Filter system: including double-stage filtration, primary filtration accuracy: 0.5um, secondary filtration accuracy: 0.003um;

Production process: all production, test process are in the clean room operation, accessories are high cleanliness;

Pressure control: the instrument is equipped with an overpressure automatic pressure relief system to ensure that the pressure is controllable;

Software design: built-in a variety of processing programs, can also be customized programs and reuse, graphical interface display;

 Recycling cycle: optional carbon dioxide high-pressure pump with CO 2 recycling interface, which can realize CO 2 pressurization and circulation;

Case design: strong corrosion-resistant box, desktop placement, save space.

4 and 6 inch sample pool fill ring 8 inch sample holder

Standard accessories:

Flexible high-pressure LCO 2 pipeline, 1.5 m, connected to the cylinder;

External stainless steel pipe, connecting the pump outlet to the instrument (interface optional);

External precision filter (filtration accuracy: 0.5 and 0.003um);

2 sets of special supports for wafer samples;

2 PTFE sample pool filling rings;

One power cable;

Anti-static drainage pipe of 4 meters;

 One set of installation tools

User instruction manual and use guide.